What Are the Key Considerations in the Electron Beam Lithography Process?
Electron beam lithography (EBL) is a crucial technique in nanofabrication, allowing us to create highly detailed patterns on various substrates. It’s a process that demands precision, and understanding the core issues is essential for achieving the best results. How do we ensure that the patterns are both accurate and reliable? What are the challenges we face in controlling the various parameters of the EBL process?
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