Mastering the E-Beam Lithographic Process: A Comprehensive Guide!
The e-beam lithographic process has revolutionized the field of microfabrication, enabling the creation of intricate patterns with unmatched precision. This technique employs a focused beam of electrons to modify a surface coated with an electron-sensitive film known as a resist. By scanning this beam across the surface, manufacturers can draw custom shapes that are later developed into functional structures.
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